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Microsensors: Principles and Applications

Julian W. Gardner




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 | #5680825 in Books |  1994-08 | Original language:English | PDF # 1 |  9.61 x.75 x6.59l, | File type: PDF | 344 pages

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The main microsensors described here are made using conventional thick and thin film technologies as well as more recent methods such as silicon micromachining. Following a chapter on basic signal processing, the book concentrates on microsensors—the processing of materials for their fabrication; the wide range of physical, chemical and mechanical principles employed and the benefits incurred from the application of smart sensors and microsensor array devices. Feat...

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