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CMOS Gate-Stack Scaling - Materials, Interfaces and Reliability Implications: Volume 1155 (MRS Proceedings)

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 | #9102176 in Books |  Cambridge University Press |  2009-11-19 | Original language:English | PDF # 1 |  8.98 x.51 x5.98l,.85 | File type: PDF | 194 pages

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To address the increasing demands of device scaling, new materials are being introduced into conventional Si CMOS processing at an unprecedented rate. Presentations collected here focus on understanding, from a chemistry and materials perspective, the mechanism of interface formation and defects at interfaces, for both conventional Si and alternative channel (Ge or III-V) systems. Several papers address reliability concerns for high-k/metal gate (basic physical models, c...

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